Precision Cleaning
Innovation in Clean Technology
Precision Cleaning
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Precision cleaning is a process that removes contaminants such as particles and ionic impurities generated on equipment components. It maintains and manages damaged component surfaces according to specific process conditions, minimizes damage to the base material, and eliminates process-related contaminants. Through these solutions, product lifespan is extended, uniformity is improved, and fine contamination is effectively controlled.
Green Resource’s cleaning technologies effectively remove various contaminants, including byproducts and particles generated during processing. By applying cleaning methods optimized for each process and base material, our solutions minimize substrate damage while maximizing contaminant removal. This enables safe reuse of components, contributing to cost reduction and improved process efficiency.
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Eco dry cleaning
This is a non-contact dry cleaning technology that uses thermal energy to break the bonding energy of contaminants deposited on the surface of the target object, thereby separating and removing them from the surface.
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Ion Beam Vacuum Cleaning
This is a non-contact dry cleaning method that uses ion beam energy to physically separate and remove contaminants deposited on the surface of the target object.
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Atmosphere Plasma Cleaning
This is a non-contact dry cleaning method that uses atmospheric-pressure plasma to remove contaminants deposited on the surface of the target object by evaporating or combusting them with thermal energy.
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Induced Plasma Vacuum Cleaning
This cleaning technology removes contaminants through physical and chemical reactions by applying cleaning gases or inert gases in an inductively coupled plasma state to the surface of the target object.